P2.0.9 Interaction of Water Vapor with SnO2
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P2.0 Metal Oxide-based Sensors
- Author(s)
- K. Watanabe, T. Ohgaki, N. Saito, S. Hishita - National Institute for Materials Science (Japan), I. Sakaguchi, H. Haneda, N. Ohashi - Kyushu University (Japan)
- Pages
- 1285 - 1288
- DOI
- 10.5162/IMCS2012/P2.0.9
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
In order to observe the interaction between the water vapor and SnO2, water vapor sensing and water vapor/solid exchange reaction using isotopic water were performed. The resistivity of SnO2 thick film at 200-500°C in Ar decreased by exposing water vapor + Ar. The highest sensing response was observed at 300°C. The isotopic water (D2O) was used as the tracer. After annealing in D2O vapor, incorporation of deuterium (D) into solid was confirmed by the secondary ion mass spectrometry. These results indicate that hydrogen diffuse into the solid from the water vapor. Amount of the deuterium in solid seems to depend on the annealing temperature.