P2.5.1 Long-Term Stability of the Low Energy Hydrogen Sensor
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P2.5 FET-based Sensors
- Author(s)
- A. Gerlitzke, K. Nörthemann, M. Lang, W. Moritz - Humboldt University (Germany), U. Banach, T. Hübert - BAM Federal Institute for Materials Research and Testing (Germany), R. Kaufer, M. Milstrey - Swissbit Germany AG (Germany), M. Woratz - Analytical Control Instruments GmbH (Germany)
- Pages
- 1571 - 1574
- DOI
- 10.5162/IMCS2012/P2.5.1
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
A silicon MIS-structure prepared with thin layers of the super-ionic conductor LaF3 and Pd is used to detect hydrogen. The sensor is able to detect hydrogen in a concentration range from below one ppm to the lower flammable limit in air which is 4 vol.-%. The chip operates at room temperature which results in an extremely low energy consumption compared to other hydrogen sensors. Only once per day a short heating pulse is necessary to reactivate the sensor chip. In cooperation with the BAM, a long-term experiment was carried out. The duration of the measurement was about three months, with a hydrogen exposure every two weeks. The sensor signal remained stable over the measured period.