B5.4 - First Investigation of LTCC package for high temperature SAW sensors
- Event
- AMA Conferences 2015
2015-05-19 - 2015-05-21
Nürnberg, Germany - Band
- Proceedings SENSOR 2015
- Chapter
- B5 - Packaging
- Author(s)
- J. Bardong, A. Binder - Carinthian Tech Research, Villach/St.Magdalen (Austria), S. Toskov, G. Miskovic, G. Radosavljevic - Institute of Sensor and Actuator Systems, Vienna (Austria)
- Pages
- 280 - 285
- DOI
- 10.5162/sensor2015/B5.4
- ISBN
- 978-3-9813484-8-4
- Price
- free
Abstract
SAW temperature sensor devices have been developed for operating temperatures up to and above 1000°C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600°C. The devices showed promising results up to 500°C.