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A6.4 - Characterization of the Polarization State of Embedded Piezoelectric Transducers by Thermal Waves and Thermal Pulses

Event
AMA Conferences 2015
2015-05-19 - 2015-05-21
Nürnberg, Germany
Band
Proceedings SENSOR 2015
Chapter
A6 - Material Characterization
Author(s)
A. Eydam, G. Suchaneck, G. Gerlach - Technische Universität Dresden (Germany)
Pages
147 - 150
DOI
10.5162/sensor2015/A6.4
ISBN
978-3-9813484-8-4
Price
free

Abstract

In this work, we demonstrate that thermal methods are a promising approach for non-destructive characterization of the polarization state of embedded piezoelectric transducers in integrated sensoractuator modules. The modules are subjected to periodic heating by a square-wave modulated laser beam or to single-pulse heating by a laser pulse. The frequency or time dependence of the resulting pyroelectric current carries information about the pyroelectric coefficient depth profile which correlates directly with the polarization distribution. In frequency domain, the sample behavior is described by a harmonically heated piezoelectric plate exhibiting heat losses to the environment characterized by a continuous distribution of relaxation times. This analytical model enables additionally the evaluation of the homogeneity of the polarization.

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