A6.2 - An integrated Nine-dimensional Hall-Gradient-Sensor
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume II
- Chapter
- A6 - Magnetic Sensors I
- Author(s)
- M. Hackner, H. Hohe, M. Stahl-Offergeld - Fraunhofer Institute for Integrated Circuits IIS, Erlangen, Germany
- Pages
- 23 - 28
- DOI
- 10.5162/sensor09/v2/a6.2
- ISBN
- 978-3-9810993-5-5
- Price
- free
Abstract
Magnetic sensors for position detection are used in many products and apparatuses. In most cases the sensor, which is used to solve the problem, can only detect one single mechanical dimension (1D) of the magnetic field or flux-denisity. But generally, mechanical movements consist of 3 degrees of translatory and 3 degrees of rotary freedom. Temperature and external fields are further quantities, which may influence the measurements. So, at least 8 independent measures have to be taken, to detect mechanical movements correctly.
In this paper, we present a new integrated multi-dimensional Hall-sensor-system, which is able to take measures of all three components Bx, By and Bz of the magnetic flux density and their spacial gradients with respect to the x- and y-direction, which are parallel to the surface of the device. This means, that 9 measures can be taken, whereas 8 are needed to cover all degrees of freedom in the system. This allows to develop sensor-systems for universal detection of position and orientation of permanent magnets.
As such systems and their sensor-signals are very complex, the microsystems technology group at the Fraunhofer Institute IIS has developed a tool, which is able to simulate magnetic fields of permanent magnets and electrical currents and calculates the induced sensor signals as a function of any user defined movement. This allows a very effective system design for contactless position measurements.