B8.2 - Three dimensional tactile-optical probing for the measurement of microparts
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume II
- Chapter
- B8 - Accurate Geometric Measurements
- Author(s)
- R. Tutsch, M. Petz - Technische Universität Braunschweig, Braunschweig, Deutschland, M. Andraes, T. Wiedenhoefer - Werth Messtechnik GmbH, Gießen, Germany, U. Neuschaefer-Rube, M. Wissmann - Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
- Pages
- 139 - 144
- DOI
- 10.5162/sensor09/v2/b8.2
- ISBN
- 978-3-9810993-5-5
- Price
- free
Abstract
The determination of structures on microparts requires particularly sensitive measuring devices. Here the so called fiber probe is an outstanding, established solution. As probing forces are in the order of some μN the surface of the object under test will not be damaged by the probing element. Furthermore effects of the probing force on the measurement uncertainty can be neglected. Beyond that so far inaccessible micro geometries (like e.g. deep, small holes with diameters less than 50 μm) can be measured easily. The tactile-optical method of measurement based on this principle does not include full 3D-capabilities so far. New developments to overcome this limitation are the stereoscopic detection of the probing sphere and the speckle pattern based analysis of the z-deflection of the probing element.