P1.13 - Application of a Touch-Probe Array for the Parallel Measurement of Microstructures
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume II
- Chapter
- P1 - Mechanical Sensors
- Author(s)
- C. Schrader, R. Tutsch, S. Buettgenbach, T. Krah - Technische Universität Braunschweig, Braunschweig, Deutschland
- Pages
- 289 - 293
- DOI
- 10.5162/sensor09/v2/p1.13
- ISBN
- 978-3-9810993-5-5
- Price
- free
Abstract
This paper deals with the development of a coordinate measuring machine for parallel tactile probing of microstructures. The particular challenges due to the parallel probing will be discussed and the concluding results regarding the construction, the control and the calibration will be outlined.