D6.1 Topography Analysis in the NPMM-200
- Event
- SMSI 2021
2021-05-03 - 2021-05-06
digital - Band
- SMSI 2021 - Measurement Science
- Chapter
- D6 Advanced Methods and Measurement Systems
- Author(s)
- E. Meta, E. Manske - Technische Universität Ilmenau, Ilmenau (Germany)
- Pages
- 266 - 267
- DOI
- 10.5162/SMSI2021/D6.1
- ISBN
- 978-3-9819376-4-0
- Price
- free
Abstract
Using a specially developed combination of phase shifting and image processing algorithms will be performed a specific analysis of relatively rough and unknown surfaces (with or without structures). These algorithms are able to evaluate phase-shifted interference images and calculate topographic data from them. Interference images, which are used for the analysis, are acquired with the help of the high-precision nanopositioning and nano-measuring machine (NPMM-200) of the Technical University of Ilmenau [1, 2].