3.4.3 Disruptive MEMS Technology Replaces Conventional Bead Pellistor Device
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- 3.4 Sensor Systems
- Author(s)
- S. Trautweiler, N. Moser, H. Delprat, S. Lepoutre, C. Alépée - e2v microsensors SA (Switzerland), T. Brown, K. Brown - e2v technologies (UK)
- Pages
- 298 - 301
- DOI
- 10.5162/IMCS2012/3.4.3
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
An industrial-suited MEMS (Micro Electro Mechanical System) is developed to launch a new generation of highvolume, low-cost and rugged sensors for the detection of combustible gases, in particular methane. Innovative process technologies combined with optimized sensing and filter materials are engineered to achieve equal or exceeding performance compared to existing products. At the same time manufacturing cost is significantly reduced. This paper outlines the concept and features of our new MEMS device and demonstrates its benefits by presenting industrial-type test methods and measurement results.