7.2.2 A Novel Flexible Chemical Imaging Set-Up of Amorphous- Si-Based Light-Addressable Potentiometric Sensor by Video Projector
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- 7.2 Electrochemical Sensors I
- Author(s)
- A. Das, Y. Lin, C. Lai - Department of Electronic Engineering, Chang Gung University (Taiwan), T. Yoshinobu - Department of Biomedical Engineering, Tohoku University (Japan)
- Pages
- 596 - 599
- DOI
- 10.5162/IMCS2012/7.2.3
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
In this work, a novel set-up of Light-Addressable Potentiometric Sensor (LAPS) for chemical imaging is demonstrated. Present set-up takes the advantage of PC interface facility by utilizing a commercial video projector as a programmable scanning light source. It delivers an easy flexible technique to control the shape, size, movement and as well as the modulation frequency of the measurement spot in user-defined manner. This discarded the complexity of using X-Y stage or multiple light sources for scanning the LAPS surface. Furthermore, atomic layer deposition (ALD) technique is adopted to deposit HfO2 thin film as a sensing membrane on amorphous-silicon based LAPS structure and a pH sensitivity of 59.42 mV/pH is achieved. Finally, the chemical image of a pattern is successfully displayed where 9,990 measuremnt spots are addressed by programming the light spot in this set-up without any mechanical movement.