| SMSI 2021 |
A3.3 Development of a Traceable Cantilever Calibration Device |
O. Dannberg, T. Fröhlich - Technische Universität Ilmenau, Ilmenau (Germany), M. Kühnel - SIOS Meßtechnik GmbH, Ilmenau (Germany) |
| SMSI 2021 |
A3.4 A Control Concept of a Compensation Load Cell in Terms of Calibration a Cantilever |
V. Cherkasova, O. Dannberg, T. Fröhlich - Technische Universität Ilmenau, Ilmenau (Germany) |
| SMSI 2021 |
A4.1 A Metrological Atomic Force Microscope for Large Range Measurements with Sub-nanometre Resolution |
Y. Wu, E. Wirthmann, U. Klöpzig, T. Hausotte - Friedrich-Alexander-Universität Erlangen-Nürnberg, Erlangen (Germany) |
| SMSI 2021 |
A4.2 Development of a Non-invasive Pressure Sensor |
P. Szász, V. Migunov - ABB Corporate Research Center, Ladenburg (Germany) |
| SMSI 2021 |
A4.4 Theoretical Analysis of Measurement Flexures at the 5 MN m Torque Standard Machine at PTB |
K. Geva, H. Kahmann, C. Schlegel, R. Kumme - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany) |
| SMSI 2021 |
A5.1 Design, Simulation, Fabrication and Characterization of Piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications |
A. Mehdaoui, C. Huber, J. Becker, F. Schraner - TrueDyne Sensors AG, Reinach (Switzerland), L. Villanueva - Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland) |
| SMSI 2021 |
A5.2 Swarm-Based Multi-Objective Design Optimization of Single-Plate Condenser MEMS Microphone |
Q. Zaman, S. Alraho, A. König - TU Kaiserslautern, Kaiserslautern (Germany) |
| SMSI 2021 |
A5.3 Designing Low Power Systems with Digital MEMS Sensors |
P. Stukjunger - STMicroelectronics, Prague (Czech Republic) |
| SMSI 2021 |
A5.4 Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip |
M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), M. Xu, U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany) |
| SMSI 2021 |
A6.1 Full Stress Tensor Measurement by Photoelasticity in Silicon |
M. Stoehr, S. Schoenfelder - University of Applied Sciences Leipzig, Leipzig (Germany), G. Gerlach - Technische Universität Dresden, Dresden (Germany), T. Härtling - Fraunhofer Institute IKTS, Dresden (Germany) |