| SMSI 2021 |
A5.2 Swarm-Based Multi-Objective Design Optimization of Single-Plate Condenser MEMS Microphone |
Q. Zaman, S. Alraho, A. König - TU Kaiserslautern, Kaiserslautern (Germany) |
| SMSI 2021 |
A5.3 Designing Low Power Systems with Digital MEMS Sensors |
P. Stukjunger - STMicroelectronics, Prague (Czech Republic) |
| SMSI 2021 |
A5.4 Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip |
M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), M. Xu, U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany) |
| SMSI 2021 |
A6.1 Full Stress Tensor Measurement by Photoelasticity in Silicon |
M. Stoehr, S. Schoenfelder - University of Applied Sciences Leipzig, Leipzig (Germany), G. Gerlach - Technische Universität Dresden, Dresden (Germany), T. Härtling - Fraunhofer Institute IKTS, Dresden (Germany) |
| SMSI 2021 |
A6.2 Adding Seebeck Coefficient Measurements to an Existing High Temperature Device for Hall Constant and Electrical Conductivity Measurements |
R. Werner, J. Kita, R. Moos - University Bayreuth, Bayreuth (Germany), M. Gollner, F. Linseis - Linseis Thermal Analysis, Selb (Germany) |
| SMSI 2021 |
A6.3 Epitaxial Graphene on SiC: A Versatile Sensing Platform for High Sensitivity Applications |
M. Rodner - Saarland University, Saarbrücken (Germany), D. Puglisi, A. Zilli, J. Eriksson - Linköping University, Linköping (Sweden) |
| SMSI 2021 |
A7.1 Smart Sensor Systems for Extremely Harsh Environments |
H. Kappert - Fraunhofer Institute IMS, Duisburg (Germany), S. Schopferer - Fraunhofer Institute EMI, Freuburg (Germany), R. Döring - Fraunhofer Institute ENAS, Chemnitz (Germany), S. Ziesche - Fraunhofer Institute IKTS, Dresden (Germany), A. Olowinsky - Fraunhofer Institute ILT, Aachen (Germany), F. Naumann - Fraunhofer Institute IMWS, Halle (Germany), M. Jägle - Fraunhofer Institute IPM, Freiburg (Germany), A. Ostmann - Fraunhofer Institute IZM, Berlin (Germany) |
| SMSI 2021 |
A7.2 Evaluation of High Temperature Ceramic Sensor Packages |
P. Gierth, L. Rebenklau, H. Barth - Fraunhofer Institute IKTS, Dresden (Germany) |
| SMSI 2021 |
A7.3 pH Measurement System-on-Foil Aided with a Mixed Signal Processor |
M. Fahem, M. Steinmaßl, K. Neumeier, I. Eisele - Fraunhofer Institute EMFT, München (Germany), E. Korek, R. Brederlow - TU München, München (Germany) |
| SMSI 2021 |
A7.4 Miniaturization of Mobile GPR Antenna Assembly |
D. Shi, T. Aftab, G. Gidion, L. Reindl - University of Freiburg, Freiburg (Germany), A. Zaragoza - Polytechnic University of Catalonia, Barcelona (Spain) |