O4.2 - Thin-Film Measurements with Short Pulse Terahertz Radiation
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings OPTO 2009 & IRS² 2009
- Chapter
- OPTO 4 - Optical Inspection and Quality Assurance
- Author(s)
- J. Jonuscheit, F. Ellrich, M. Theuer, G. Torosyan, R. Beigang - Fraunhofer Institut für Physikalische Messtechnik IPM, Kaiserslautern, Germany
- Pages
- 99 - 100
- DOI
- 10.5162/opto09/o4.2
- ISBN
- 978-3-9810993-6-2
- Price
- free
Abstract
The potential of short terahertz pulses for thin-film measurements of materials opaque in the visible range is demonstrated. Layer thicknesses down to 10 µm have been determined in reflection measuring mode and complex multilayer structures in the subwavelength range have been resolved with this technique.