1.4 - Quasi-static Microscanner with Linearized Scanning for an adaptive 3D-Lasercamera
- Event
- AMA Conferences 2013
2013-05-14 - 2013-05-16
Nürnberg - Band
- Proceedings OPTO 2013
- Chapter
- O1 - New Components for Detection and Sensing
- Author(s)
- T. Sandner, T. Grasshoff, M. Schwarzenberg, H. Schenk - Fraunhofer Institute for Photonic Microsystems (IPMS), Dresden (Germany)
- Pages
- 28 - 33
- DOI
- 10.5162/opto2013/o1.4
- ISBN
- 978-3-9813484-3-9
- Price
- free
Abstract
This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective 5mm a synchronized driven MEMS scanner array - consisting of five hybrid assembled MEMS devices - are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3…5mm at 7.5m measuring range for a gray target.