I3.1 - Design, Operation and Performance of a Fabry-Perot-Based MWIR Microspectrometer
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings OPTO 2009 & IRS² 2009
- Chapter
- IRS² 3 - Spectroscopy
- Author(s)
- M. Ebermann, N. Neumann - InfraTec GmbH, Dresden, Germany, K. Hiller - Chemnitz University of Technology, Chemnitz, Germany, S. Kurth - Fraunhofer Institute for Reliability and Microintegration, Chemnitz, Germany
- Pages
- 233 - 238
- DOI
- 10.5162/irs09/i3.1
- ISBN
- 978-3-9810993-6-2
- Price
- free
Abstract
In this paper we present basic designs, operation concepts and some application examples of a novel microspectrometer for the spectral range of 3-5μm, which is based on a pyroelectric detector with an integrated micromachined Fabry-Perot filter (FPF). We discuss the influence of different optical setups on the spectral resolution and the signal-to-noise ratio of the microspectrometer. Two basic operation modes, step-scan mode and continuous-sweep mode are demonstrated. Such a device has a large potential in the field of infrared absorption spectroscopy, particularly if multicomponent mixtures have to be analyzed.