IP9 - Thermal Cross-Talk in IC-Compatible Micromachined Infrared Thermopile Detector Arrays
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings OPTO 2009 & IRS² 2009
- Chapter
- IRS² Poster Session
- Author(s)
- H. Wu - Delft University of Technology, Delft, The Netherlands
- Pages
- 319 - 323
- DOI
- 10.5162/irs09/ip9
- ISBN
- 978-3-9810993-6-2
- Price
- free
Abstract
Arrays of thermal detectors are widely applied in optical instruments. IC technology enables the fabrication of large numbers of indentical thermal sensors. Thermal cross-talk between neighboring sensors is a common problem in these devices. This papaer discusses thermal cross-talk in ThermoElectric (TE) detector array on thin-film bridges for an infrared(lR) micro-spectrometer. In this system the disprsed IR spectrum from a different grating is projected onto a detector array. The position of a spectral component within the IR spectrum is determined by the position of the element in the array, and the optical power within that part of the spectrum which is also the absorbed heat at that element. The temperature gradient at each element due to the absorbed IR radiation is detected using a thermopile between suspended absorber and the bulk silicon. Measuring temperature difference makes the integrated system insensitive to variations in chip temperature.