HI.1 - Fully Integrated Electrochemical Sensors: a Disruptive Alternative Compatible With Microelectronics Procedures
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- Hybrid/Integrated Sensors
- Author(s)
- A. Tarancón, F. Baiutti, A. Morata, N. Alayo, I. Garbayo, F. Chiabrera - Catalonia Institute for Energy Research, IREC, Sant Adrià del Besòs, Barcelona (Spain), L. Fonseca - Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Bellaterra, Barcelona (Spain), J. Morante - Departament d’Electrònica, Universitat de Barcelona, Barcelona (Spain)
- Pages
- 372 - 373
- DOI
- 10.5162/IMCS2018/HI.1
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
Solid-state gas sensors are required to undergo a profound renovation in the next years in order to respond to new challenges in terms of portability, start-up response, sensitivity. In the present contribution, a novel approach for lambda sensors based on a nanometric, free-standing, full-ceramic membrane is presented. State-of-the-art, advantages and the challenges of such a technology, which combines advanced material engineering with low cost and batch production, are highlighted.