P2MM.5 - COM Model of SAW Gas Sensor Including the Acoustoelectric Effect
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- P-2 - Mechanisms, Modeling and Simulation
- Author(s)
- W. Luo, L. Yu, T. Yang, X. Xie, Q. Fu - School of Optical and Electronic Information, Engineering Research Center for Functional Ceramics of the Ministry of Education, Huazhong University of Science and Technology, Wuhan (China), H. Li - Institute of Acoustics, Chinese Academy of Sciences, Beijing (China)
- Pages
- 833 - 834
- DOI
- 10.5162/IMCS2018/P2MM.5
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
Extensive research has been carried out on surface acoustic wave (SAW) gas sensor recently. In this paper, a modified coupling of modes (COM) model including acoustoelectric effect for the conductive SAW gas sensors were presented. The whole device performance and variation due to the conductivity variation can be calculated based on this model. Also, a ladder-type behavior of the center frequency variation versus surface conductivity of the film were founded and explained, which corresponds well with our previous results. The center frequency variation and phase catastrophe point variation are two conventional variable observed during the sensing process. Furthermore, we studied the variation of the phase of the S21 parameter with the gas concentration, and found this relationship corresponded with the elementary theory. It was concluded that the phase catastrophe point variation are more suitable for being adopted as the variable during gas sensing test.