A5.1 Development of a 3D-integrated Thermocatalytic Sensor for Combustible Gas Detection
- Event
- SMSI 2020
-
(did not take place because of Covid-19 virus pandemic) - Band
- SMSI 2020 - Sensors and Instrumentation
- Chapter
- A5 Sensor Materials and Technologies
- Author(s)
- F. Münchenberger, S. Dreiner, H. Kappert, R. Neubieser, H. Vogt - Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg (Germany)
- Pages
- 77 - 78
- DOI
- 10.5162/SMSI2020/A5.1
- ISBN
- 978-3-9819376-2-6
- Price
- free
Abstract
A process to integrate a thermocatalytic sensor on top of a CMOS circuitry is presented. Therefore, COMSOL Multiphysics® simulations are performed to evaluate a heater with an optimized temperature uniformity and a suspended design of the sensor element to achieve thermal decoupling from the substrate. The steps for fabrication are shortly described using ALD materials and a sacrificial layer. An example for a released heater structure is shown.