D6.4 Fundamentals of Dynamic Sensor Positioning with Nanoscale Accuracy by an Inverse Kinematic Concept
- Event
- SMSI 2020
-
(did not take place because of Covid-19 virus pandemic) - Band
- SMSI 2020 - Measurement Science
- Chapter
- D6 Inverse Problems in Measuring Technology
- Author(s)
- G. Straube, S. Fischer Calderón, I. Ortlepp, E. Manske - Technische Universität Ilmenau, Ilmenau (Germany)
- Pages
- 307 - 308
- DOI
- 10.5162/SMSI2020/D6.4
- ISBN
- 978-3-9819376-2-6
- Price
- free
Abstract
A recent challenge in measurement science is the growing demand for machines allowing nanoscale positioning and measuring in large volumes. The moving stage principle typically used for these applications needs to be altered, considering the mass of the moving stage growing with the measuring volume. This paper proposes an inverted kinematic concept and discusses two approaches to the reconstruction of mirror profiles to compensate for deviations in the mirror topographies.