A4.3 - Compact Coriolis Mass Flow Meter/Controller for Low Flows
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume I
- Chapter
- A4 - Mechanical Sensors II (Level and Flow Sensors)
- Author(s)
- M. Katerberg - Bronkhorst Cori-Tech B.V., Ruurlo, Netherlands
- Pages
- 103 - 108
- DOI
- 10.5162/sensor09/v1/a4.3
- ISBN
- 978-3-9810993-4-8
- Price
- free
Abstract
The accurate and fast measurement of small mass flow rates down to 1 g/h of fluids is considered an “enabling technology” in various industries. Applications for instruments capable of measuring these low flow rates can be found in e.g. semiconductor, fine-chemical, pilot plants, food & pharmaceutical industries and liquid dosing systems for micro reactors. Mass flow meters based on the Coriolis effect offer the most direct sensing of the mass flow rate, and for this reason do not need complicated translation or linearization tables to compensate for other physical parameters (e.g. density, temperature, heat capacity, viscosity, etc.) of the medium that they measure. To measure low mass flow rates using the Coriolis principle the flow tube has to be scaled-down. Conventional Coriolis mass flow meters use e.g. magnets or coils attached to the tube for actuating and sensing. When scaling down conventional designs, the tube becomes so small that any attachment will ruin the performance. Therefore another approach is needed. This article describes some of the design aspects that have contributed to a new compact Coriolis mass flow meter/controller. Also the performance of the final product is shown.