A5.3 - Optical Sensor for Flow Measurement in Microstructures
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume I
- Chapter
- A5 - Mechanical Sensors III
- Author(s)
- J. Zosel, U. Guth - Kurt-Schwabe Research Institute, Ziegra-Knobelsdorf, Germany, D. Petrak, H. Rauh - Chemnitz University of Technology, Chemnitz, Germany
- Pages
- 127 - 132
- DOI
- 10.5162/sensor09/v1/a5.3
- ISBN
- 978-3-9810993-4-8
- Price
- free
Abstract
The galvanic production of electronic and micro mechanical components is accompanied by continuous miniaturisation of structures and therefore needs to be improved with respect to the exchange rate of electrolytes and cleaning fluids in the micro structures. Numerous conditions in modern devices for continuous galvanic plating of microstructures are opposed to the application of electrical, thermal and electrochemical sensors as well as to classical optical methods like micro-PIV or micro-LDA for flow measurements in the electrolyte. Electrochemical flow sensors were used for this purpose successfully, but they require time consuming and frequent calibration and are not easy to use in those devices.
To provide a sensor and a measuring method for investigation and monitoring of electrolyte flow in galvanic baths for the production of micro structures, the principle of flow measurement with a fibre optical spatial filter was adapted to a micro capillary and tested in free impinging jet flows.