P1.0.4 Enhanced Room Temperature Response of SnO2 Thin Film Sensor Loaded with Pd Catalyst Clusters Under UV Radiation for Methane
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.0 Metal Oxide-based Sensors
- Author(s)
- D. Haridas, K. Mahavidyalaya - University of Delhi, Pitampura (India), V. Gupta - Department of Physics and Astrophysics, University of Delhi (India)
- Pages
- 758 - 760
- DOI
- 10.5162/IMCS2012/P1.0.4
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
Room temperature response characteristics of SnO2 thin film sensors loaded with palladium catalyst clusters of varying thickness are investigated for methane under the exposure of ultraviolet radiation. The SnO2-Pd cluster sensor structures have been prepared using rf sputtering. Combined effect of UV radiation exposure (wavelength=365 nm) and presence of Pd catalyst clusters (10 nm thick) on SnO2 thin film sensor surface is seen to lead to an enhanced sensing response (252.3) for the detection of methane (200 ppm) at room temperature which is similar (158) to that obtained without UV illumination at elevated temperature of 220°C. Obtained results are encouraging for commercial realization of room temperature SnO2 based thin film sensor for CH4 gas with enhanced response.