P1.0.11 The sensing behavior of semiconductor metal oxides based on SnO2 thick film for detection of chlorinated VOCs in low concentration
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.0 Metal Oxide-based Sensors
- Author(s)
- H. Aliha, A. Khodadadi - School of Chemical Engineering, College of Engineering, University of Tehran (Iran), Y. Mortazavi - Nanoelectronics Centre of Excellence, University of Tehran (Iran)
- Pages
- 780 - 782
- DOI
- 10.5162/IMCS2012/P1.0.11
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
A SnO2-based semiconductor thick film gas sensor was fabricated for detection of chlorinated VOCs such as dichloromethane (DCM) and trichloroethylene (TCE) at concentrations of 10 and 20 ppm respectively in the temperature range of 100–400°C. Other semiconductors such as ZnO, CuO and Sm2O3 were added in 5.0% wt to SnO2 by co-precipitation method. The samples were characterized by TEM, XRD and BET. Characterization results showed that presence of dopants causes an increase in surface area and a decrease in the particle size of the sensing materials. Moreover, the TEM micrographs confirmed that the size of synthesized materials is less than 20 nanometers. It was found that SnO2-Sm2O3 has the highest sensitivity to DCM, especially at low temperatures. Also sensitivity is quite high for this sensor even at a concentration as low as 0.1 ppm. However, presence of promoters suppressed the sensitivity to TCE.