P1.0.22 Low Power Consumption Micro C2H5OH Gas Sensor based on Micro-heater and Screen Printing Technique
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.0 Metal Oxide-based Sensors
- Author(s)
- S. Moon, H. Lee, N. Choi, J. Lee, C. Choi, W. Yang, J. Kim - ETRI (Korea), J. Jong, D. Yoo - Sentech Korea (Korea)
- Pages
- 814 - 817
- DOI
- 10.5162/IMCS2012/P1.0.22
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
Micro C2H5OH gas sensor was fabricated based on micro-heater using tin oxide nano-powders with low power consumption and high sensitivity. Semiconducting SnO2 nano-powders were synthesized via co-precipitation method, and to increase the sensitivity for alcohol gas rare metal dopants were added. In the structure of microheater, the resistances of two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Based on the above design, low power consumption alcohol gas sensor was fabricated by using CMOS compatible MEMS process. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique. Micro gas sensor showed substantial sensitivity down to 0.5 ppm alcohol at low power consumption (35 mW).