P1.2.8 Screen-printed PZT cantilevers coated with PEUT for toluene detection. Comparison with silicon cantilevers
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.2 Resonant Sensors
- Author(s)
- R. Lakhmi, H. Debéda, C. Lucat - Université de Bordeaux, Laboratoire IMS (France)
- Pages
- 909 - 912
- DOI
- 10.5162/IMCS2012/P1.2.8
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
Self-actuated and self read-out PZT cantilevers made of Au/PZT/Au (8x2x0.08mm3) beam layers on an alumina substrate are fabricated thanks to the association of screen-printing and sacrificial layer technique. Then, PZT cantilevers used as piezoelectric resonant type sensors are functionalized with an organic PEUT layer for toluene detection at room temperature. Due to their higher resonant frequency, cantilevers using the unusual 31 longitudinal vibration mode have higher sensitivities (0.047Hz/ppm) than those actuated with the classical flexural mode. These interesting results demonstrate the potentialities of printed PZT.