P1.2.10 Recycling of Cantilevers for Nanoparticle Detection by Lift-off Technique
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.2 Resonant Sensors
- Author(s)
- S. Merzsch, H. Wasisto, A. Waag, E. Peiner - Braunschweig University of Technology, Institute of Semiconductor Technology (Germany), I. Kirsch, E. Uhde, T. Salthammer - Fraunhofer WKI, Material Analysis and Indoor Chemistry (MAIC) (Germany)
- Pages
- 916 - 919
- DOI
- 10.5162/IMCS2012/P1.2.10
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
Monitoring of engineered airborne nanoparticles is prerequisite to their safe industrial use. Workmen, inhaling particles, are endangered to sustain health hazards. A silicon resonant cantilever sensor has been proven a tool for sampling and recognizing airborne particles at high sensitivity. For repeated usability of the resonator the trapped particles have to be removed which is accomplished by a sacrificial layer deposited on the polluted cantilever surface. Particles, forced by an electrostatic field, settle on top of the layer in spite of the silicon. Within a wet cleaning, not only the additional layer is removed, but also the trapped nanoparticles. This method has been proven by using titanium or conventional photoresist as a covering layer. For the latter, cleaning efficiency is proven by detection of resonant frequency.