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A2.1 - High-G and High Bandwidth Characterization of Piezoresistive MEMS Accelerometers for Crash Test Applications

Event
AMA Conferences 2013
2013-05-14 - 2013-05-16
Nürnberg
Band
Proceedings SENSOR 2013
Chapter
A2 - Mechanical Sensors II
Author(s)
S. Kühne, T. Kiko, C. Cavalloni - Kistler Instrumente AG, Winterthur (Switzerland), U. Lang - Lucerne University of Applied Sciences and Arts, Horw (Switzerland), R. Theurillat, R. Leine - Center of Mechanics, Zurich (Switzerland)
Pages
41 - 45
DOI
10.5162/sensor2013/A2.1
ISBN
978-3-9813484-3-9
Price
free

Abstract

Crash and pyro shock tests, which are used to improve or test technical safety structures, are represented by high g and high bandwidth excitations. Accelerometers used to record these tests must be able to closely capture data under extreme conditions without major distortions. Therefore, reliable calibration schemes have to be developed that allow for a sensor characterization over the whole measurement range. Existing approaches are either restricted in bandwidth or in amplitude. In
the current paper, we present a methodology that can be applied to typical MEMS accelerometers based on air gap damping and that considerably improves sensor accuracy even at high g and high bandwidth ranges.

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