P3.4 - Fabrication of Silicon Oxycarbide-Based Microcomponents via Photolithographic and Soft Lithography Approaches
- Event
- AMA Conferences 2013
2013-05-14 - 2013-05-16
Nürnberg - Band
- Proceedings SENSOR 2013
- Chapter
- P3 - Technology
- Author(s)
- E. Ionescu, S. Martinez Crespiera, M. Schlosser, R. Riedel, K. Flittner, H. Schlaak - Technische Universität Darmstadt (Germany)
- Pages
- 746 - 749
- DOI
- 10.5162/sensor2013/P3.4
- ISBN
- 978-3-9813484-3-9
- Price
- free
Abstract
This study presents the preparation of ceramic micro components starting from a commercially available polysiloxane. The ceramic micro components were prepared via photolithographic and soft litho¬graphy approaches. The ceramic samples prepared upon photolithography exhibit aspect ratios of 3:1 as well as dimensions down to 20 μm. Furthermore, soft lithographic techniques have been used to prepare dense, crack free and complex-shaped SiOC-based micro components (e.g., a valve seat for a miniaturized burner).