P4 - Methodology for micro-fabricating free standing micromechanical structures for infrared detection
- Event
- AMA Conferences 2013
2013-05-14 - 2013-05-16
Nürnberg - Band
- Proceedings IRS² 2013
- Chapter
- IP - Poster Session
- Author(s)
- M. Steffanson, T. Ivanov, I. Rangelow - Ilmenau University of Technology, (Germany)
- Pages
- 105 - 109
- DOI
- 10.5162/irs2013/iP4
- ISBN
- 978-3-9813484-3-9
- Price
- free
Abstract
Within our research and development activities on thermo-mechanical infrared sensitive microstructures we have developed a comprehensive methodology and strategy to develop, fabricate, characterize and evaluate a novel-type micro-device. In this paper we use and explain the example of fabricating two types of micro-mechanical, fully-functional, free-standing structures by using plasma and low pressure chemical vapour deposition technology. Methods of micro-fabrication techniques, such as bulk micro-fabrication and surface micro-machining are analyzed and our critical processtechnology findings are explained. Examples of successfully fabricated micro-mechanical IR sensors are given.