Plenary Talk 1 - Microphones MEMS Development towards high SNR
- Event
- AMA Conferences 2017
2017-05-30 - 2017-06-01
Nürnberg, Germany - Band
- AMA Conferences 2017
- Chapter
- Proceedings Sensor 2017
- Author(s)
- A. Dehé - Infineon Technologies AG, Neubiberg (Germany)
- Pages
- 23 - 23
- DOI
- 10.5162/sensor2017/1
- ISBN
- 978-3-9816876-4-4
- Price
- free
Abstract
The fast progressing consumer market for smart phones challenges the development of silicon MEMS microphones with ever higher key performance parameters. While in 2006 the signal to noise ratio was at 60dB(A) it doubled until 2014 (fig. 1) and is about to double again in half the time (fig. 2). This talk will show the state of the art standard condenser microphone performance and describe a way towards lowest noise MEMS microphones utilizing interdigitated comb sensors. Design constraints and fabrication results will be discussed. Finally, the first measurements of MEMS microphones with SNR larger than 72dB(A) will be presented.