P2EM.11 - Imprinted photonic crystal nanocavity composed of inversely tapered air holes for highly sensitive optical sensor
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- P-2 - Emerging Sensor Technologies
- Author(s)
- K. Maeno, S. Aki, K. Sueyoshi, H. Hisamoto - Osaka Prefecture University, Osaka (Japan), K. Satoh, S. Murakami, Y. Sando, Y. Kanaoka - Osaka Research Institute of Industrial Science and Technology(ORIST), Osaka (Japan), T. Endo - JST PRESTO, Tokyo (Japan)
- Pages
- 767 - 768
- DOI
- 10.5162/IMCS2018/P2EM.11
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
Polymer-based photonic crystal nanocavity (PCN) composed of tapered and inversely tapered air holes for optical sensing application was successfully fabricated. Polymer-based PCN fabricated by using nanoimprint lithography (NIL) is a promising device for highly-sensitive optical sensor. From the view point of sensing application, the efficiency of light confinement in PCN is a significant factor. However, polymer-based PCN possessed low efficiency caused of low refractive index of polymer material. In this research we found that the shape of air holes composing PCN contributed to the confinement efficiency. We fabricated PCNs composed of cylindrical, tapered, and inversely-tapered air holes by using NIL technique. As an optical measurement result, the inversely tapered one showed the strongest light confinement and two times higher Q value than that of tapered one.