B7.3 Influences of the Microstructure on the Drift Velocity of Electromigrating Aluminum through Molybdenum Disilicide Thin films
- Event
- SMSI 2021
2021-05-03 - 2021-05-06
digital - Band
- SMSI 2021 - Sensors and Instrumentation
- Chapter
- B7 Sensor Materials I
- Author(s)
- M. Schädel, J. Baldauf - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- Pages
- 149 - 150
- DOI
- 10.5162/SMSI2021/B7.3
- ISBN
- 978-3-9819376-4-0
- Price
- free
Abstract
A difference of the drift velocity of aluminum could be observed for polycrystalline thin film conductor lines made of molybdenum disilicide with different grain sizes in the scanning electron microscope.