2025 SMSI Bannerklein

Available documents

Event Title Author(s)
SMSI 2021 B7.1 Highly Stable Pressure Sensors made of <110> Silicon T. Frank, R. Röder, S. Jagomast, H. Übensee, A. Cyriax, T. Ortlepp - Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
SMSI 2021 B7.2 Influence of the Gas Velocity on the Temperature Homogeneity of Transducers for Gas Sensors J. Herrmann, T. Kern, G. Hagen, R. Moos - University of Bayreuth, Bayreuth (Germany)
SMSI 2021 B7.3 Influences of the Microstructure on the Drift Velocity of Electromigrating Aluminum through Molybdenum Disilicide Thin films M. Schädel, J. Baldauf - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)