B1.3 - CMOS Based Integration Technology for Solid State pH-Measurement
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- B1 - Optical Biosensors
- Author(s)
- O. Hild, F. Al-Falahi, C. Beale, C. Kunath, E. Kurth - Fraunhofer IPMS, Dresden (Germany)
- Pages
- 88 - 89
- DOI
- 10.5162/SMSI2023/B1.3
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
The measurement of pH with ion-sensitive field-effect transistors (ISFETs) as a half-cell, in combination with a silver/silver chloride reference electrode as a second half-cell, is state of the art. Here we present an integration technology that allows for the fabrication of an ISFET with a solid-state reference element (REFET) on one chip, while permitting connectivity to IC-CMOS technology.