C2.2 - Development of a conductive MEMS-SPM for nanoelectrical characterisation of nanostructured materials
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- C2 - Prospects for Measurement Science and Metrology
- Author(s)
- Z. Li, U. Brand, C. Kuhlmann - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), K. Kaja, F. Piquemal - Laboratoire national de métrologie et d’essais, Trappes Cedex (France), S. Hahn, K. Hiller - Technische Universität Chemnitz, Chemnitz (Germany)
- Pages
- 151 - 152
- DOI
- 10.5162/SMSI2023/C2.2
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
A conductive MEMS based scanning probe microscope (MEMS-SPM) has been developed to measure the mechanical and electrical properties of nanostructured materials including nanopillars and nanowires for energy harvesting devices. The MEMS-SPM features an integrated AFM cantilever gripper, with which various conductive AFM probes can be used as tactile stylus for nano-dimensional, nanomechanical and -electrical measurements. First measurement results will be presented.