2025 SMSI Bannerklein

E7.3 - Development of a Chromatic Confocal Sensor Model Dedicated to Investigating Object-Dependent Effects

Event
SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg
Band
Lectures
Chapter
E7 - New Measurement and Sensor Approaches
Author(s)
D. Linnert, U. Neuschaefer-Rube - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), M. Stavridis - Physikalisch-Technische Bundesanstalt, Berlin (Germany)
Pages
276 - 277
DOI
10.5162/SMSI2023/E7.3
ISBN
978-3-9819376-8-8
Price
free

Abstract

In optical dimensional metrology object-dependent systematic effects significantly influence measurements and limit traceability. With the aim to describe and if possible correct systematic effects and estimate task-specific measurement uncertainties, PTB developed a virtual instrument that allows to consider the influence of the specimen. Early simulations show such effects.

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