2025 SMSI Bannerklein

6.4 - MEMS-Varactors: challenges for large tuning ratios

Event
iCCC2024 - iCampµs Cottbus Conference
2024-05-14 - 2024-05-16
Cottbus
Band
Vorträge
Chapter
Kommunikation und HF-MEMS
Author(s)
M. Stolz, K. Schimmanz - Fraunhofer IPMS, Dresden , J. Okocha - Brandenburgische Technische Universität Cottbus-Senftenberg, Cottbus
Pages
92 - 95
DOI
10.5162/iCCC2024/6.4
ISBN
978-3-910600-00-3
Price
free

Abstract

Different modern applications, such as tuner circuits, high-frequency voltage-controlled oscillators (VCO), RF-filters, radio front-end systems as well as many sensor systems require adjustable electrical capacitances – called varactors. The standard semiconductor varactors are strongly limited in the max-imum reachable tuning ratio (TR), which is needed to cover bigger frequency ranges. This paper pre-sents a possibility use of micro electro-mechanical (MEMS) varactors instead, to achieve high TR, ana-lyze the challenges from different aspects and propose an example design of it.

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