2025 SMSI Bannerklein

P22 - Investigation of Application-Specific Assembly Technologies and Metrological Influencing Factors of MEMS-based NIR Spectral Sensors

Event
22. GMA/ITG-Fachtagung Sensoren und Messsysteme 2024
2024-06-11 - 2024-06-12
Nürnberg
Band
Poster
Chapter
Poster
Author(s)
J. Otto, K. Krieger - Universität Bremen (ITEM),Bremen
Pages
505 - 509
DOI
10.5162/sensoren2024/P22
ISBN
978-3-910600-01-0
Price
free

Abstract

The article compares different construction and housing technologies of a compact, MEMS-based near-infrared (NIR) spectral sensor and highlights their advantages and disadvantages. The arrangement and alignment of the radiation source and the detector in particular have a significant influence on the quality of the spectral measurement. The optical beam path can be positively influenced by the design of these sensor components, thus improving the spectral measurements. In addition, external mechanical and thermal influencing factors on MEMS spectral detectors are examined and possibilities for algorithmic calibration and compensation are presented. Mechanical vibrations and shocks influence the interferometer in the MEMS-FPI detector, which results in a disturbance of the measurement. Thermal loads, such as temperature fluctuations, also lead to a change in the measurement behavior. This results in a measurement deviation of the detected intensity and wavelength. The concepts and results presented serve as a basis for taking the development of new types of MEMS-based spectral sensors to a new level and promoting their applicability in various areas.

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