PT5.92 - Enhancement of Receptor Function on Metal Oxide Semiconductor Gas Sensors for Ultra Selectivity
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT5 - Chemical Sensors
- Author(s)
- K. Shimanoe, H. Yang, K. Suematsu, K. Watanabe - Kyushu University, Kasuga (Japan)
- Pages
- 357 - 358
- DOI
- 10.5162/EUROSENSORSXXXVI/PT5.92
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
In this study, we investigated the combination of receptor function, one of the material design guidelines for semiconductor gas sensors, and the gas adsorption characteristics during MEMS driving, along with the reaction with adsorbed oxygen during heating, to achieve ultra-high selectivity. Specifically, by using MoO3-loaded SnO2 particles as the sensing film of MEMS gas sensors and applying double-pulse driving, we found a significant improvement in ethanol sensitivity compared to methanol.