PT5.174 - Chip-set for Chemoresistive Gas Sensors
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT5 - Chemical Sensors
- Author(s)
- K. Pankász - Budapest University of Technology and Economics, Budapest (Hungary)
- Pages
- 385 - 386
- DOI
- 10.5162/EUROSENSORSXXXVI/PT5.174
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
A chip set for development of chemoresistive gas sensors is presented. The basic chip carries three microheaters with resistance measuring electrodes on their top. Manually aligned masking chips ena-ble local deposition of the sensing layer on the heaters’ surface. The use of the chip set facilitates the functional characterization of the sensing layer without the need of chip processing capabilities.