A6 - Acoustoelectric effect in ZnO-based SAW delay lines induced by UV lightadsorption
- Event
- 20th Jubilee Winter Workshop
on Acoustoelectronics
2024-02-24 - 2024-02-27
Szczyrk, Beskidy Mountains (Poland) - Chapter
- Acoustoelectronics
- Author(s)
- C. Caliendo - IFN-CNR,Rome (Italy), M. Benetti, D. Cannatà - IMM-CNR, Rome (Italy), A. Buzzinc, F. Grossic, G. de Cesare - Sapienza University of Rome, Rome (Italy)
- Pages
- 16 - 17
- DOI
- 10.5162/20WWonAE/A6
- ISBN
- 978-3-910600-05-8
- Price
- free
Abstract
Thin c-ZnO piezoelectric films were grown by rf reactive magnetron sputtering technique onto fused silica substrates at 200°C.Split finger Al interdigitated transducers (IDTs) with periodicity of 80 μm were photolithographically implemented onto the free surface of the ZnO layer to excite the propagation of the fundamental Rayleigh mode as well as of its third harmonic. The acoustoelectric effect (AE), the waves velocity changes induced by the UV light adsorption in the photoconductive ZnO layer, was experimentally investigated by measuring the wave velocity in dark and under UV illumination at 365 nm at different power values. The AE effect induced in the ZnO/SiO2 structure has been investigated theoretically by 2D finite element model.