| SENSOR+TEST Conferences 2011 |
B4.1 - Acceleration Sensor IP-Blocks for MEMS Foundry Surface Micromachining Process |
R. Knechtel, S. Dempwolf, S. Hering - X-FAB Semicon¬ductor Foundries AG, Erfurt (Germany), T. Link - Micromountains Application AG, Villingen Schwenningen (Germany), M. Trächtler, J. Dehnert, D. Hoffmann - HSG-IMIT, Villingen Schwenningen (Germany) |
| SENSOR+TEST Conferences 2011 |
B4.2 - Novel Fiber-Optical Accelerometer for Monitoring Tasks of Power Generators |
M. Villnow, M. Willsch, T. Bosselmann - Siemens AG, Erlangen (Germany), B. Schmauss - Universität Erlangen (Germany) |
| SENSOR+TEST Conferences 2011 |
B4.3 - Curvature Effects on Elongated Capactive Proximity Sensors |
T. Schlegl, T. Bretterklieber, H. Zangl - Graz University of Technology (Austria) |
| SENSOR+TEST Conferences 2011 |
B4.4 - Uncertainties of a Linear Variable Differential Inductor Probe for Picometer Resolution Measurement Systems |
B. Aschenbrenner, B. Zagar - Johannes Kepler University Linz (Austria) |
