I1.2 - High-Performance Pyroelectric Infrared Detectors
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings OPTO 2009 & IRS² 2009
- Chapter
- IRS² 1 - Infrared Sensors
- Author(s)
- M. Schossig, V. Norkus, G. Gerlach - Technische Universität Dresden, Dresden, Deutschland
- Pages
- 191 - 196
- DOI
- 10.5162/irs09/i1.2
- ISBN
- 978-3-9810993-6-2
- Price
- free
Abstract
We report on the fabrication of ultrathin self-supporting LiTaO3 layers for high-performance pyroeledric single-element detectors. Thereby, only the area of the radiation-sensitive element is reduced to the desired thickness to keep the mechanical stability of the pyroelectric chip. This is done by an ion beam etching process at which a minimum thickness of 600 nm could be achieved. The small element thickness leads to a reduced heat capacity of the radiation-sensitive element resulting in a faster response. Time constants in the range of some milliseconds could be measured. Furthermore, the dielectric properties of the ultrathin lithium tantalate layers have been investigated. Measurements of the detector performance in vacuum revealed a maximum specific defectivity D* of more than D* of 5·10E9 cm HzE½ WE-1.