I1.3 - Thermopile infrared sensor with precisely patterned high-temperature resistant black absorber layer
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings OPTO 2009 & IRS² 2009
- Chapter
- IRS² 1 - Infrared Sensors
- Author(s)
- A. Ihring, U. Dillner, E. Kessler - Institut für Photonische Technologien e.V. (IPHT), Jena, Germany, T. Hoyer - Hermsdorfer Institut für Technische Keramik e.V. (HITK), Hermsdorf, Germany
- Pages
- 197 - 202
- DOI
- 10.5162/irs09/i1.3
- ISBN
- 978-3-9810993-6-2
- Price
- free
Abstract
A thermopile infrared microsensor with a new broad band absorber layer is presented. Based on special carbon particles incorporated in a heteropolysiloxane nano composite matrix, which can be spin-coated on a wafer, the new absorber layer is high-temperature resistant up to 300 °C and can be patterned precisely by etching technologies. The sensor has a circular absorber area of 0.5 mm diameter. If nitrogen-backfilled, the sensor showed a responsivity and time constant of 280 V/W and 43 ms, respectively. A detectivity of about 7x10E8 cmHzE½/W was achieved.