B8.1 - Digital Holography: Evolution from a Research Topic to a Versatile Tool for the Inline 100% 3D Quality Control in Industry
- Event
- AMA Conferences 2017
2017-05-30 - 2017-06-01
Nürnberg, Germany - Band
- Proceedings Sensor 2017
- Chapter
- B8 - Optical Measurement Systems II
- Author(s)
- M. Fratz, T. Beckmann, A. Schiller, T. Seyler, A. Bertz, D. Carl, K. Buse - Fraunhofer IPM, Freiburg (Germany)
- Pages
- 286 - 289
- DOI
- 10.5162/sensor2017/B8.1
- ISBN
- 978-3-9816876-4-4
- Price
- free
Abstract
Digital multiwavelength holography is a technique for precise 3D height measurements of optically rough surfaces. We demonstrate measurements on a milled surface, using four wavelengths between 514 and 532 nm, and achieve precision in the submicrometer range. Height structures of < 400 nm can be resolved up to an unambiguous height of 370 μm and with a lateral resolution of 7 μm. Acquisition times of < 400 ms, including the time needed for parallel processing of the data, make our
sensor a versatile tool for high-throughput 100% inspection in manufacturing environments.