P1SM.5 - Dry transfer print process of SnO2 nanowires for gas sensor manufacturing
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- P-1 - Sensor Systems and Manufacturing
- Author(s)
- F. Sosada-Ludwikowska, R. Wimmer-Teubenbacher, A. Köck - Materials Center Leoben Forschung GmbH, Leoben (Austria)
- Pages
- 647 - 648
- DOI
- 10.5162/IMCS2018/P1SM.5
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
SnO2 nanowires have been synthesized and implemented on Si-based sensors with gold inter-digital electrode structures (IDES). A dry transfer printing technology employing a PDMS-stamp has been used to fabricate multi-nanowire gas sensing devices with good reproducibility. Successful operation of the SnO2 nanowire-based gas sensors has been demonstrated which show a high sensitivity to hydrogen sulfide. This dry transfer printing technique might be the technology of choice for controlled fabrication of nanowire-based devices and could be easily adapted for industrial production.