P1SM.7 - Investigation of active heated gas filters on metal oxide gas sensors using a microstructured stacked-die setup
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- P-1 - Sensor Systems and Manufacturing
- Author(s)
- T. Graunke, S. Raible - ams Sensors Germany GmbH, Reutlingen (Germany), K. Tarantik, K. Schmitt, J. Wöllenstein - Fraunhofer Institute for Physical Measurement Techniques IPM, Freiburg (Germany)
- Pages
- 651 - 652
- DOI
- 10.5162/IMCS2018/P1SM.7
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
This work presents a new approach to improve the selectivity and stability of metal oxide gas sensors by using active heated filter components. The “stacked die” microsystem consists of a micromachined metal oxide gas sensor, a preheater chip and a catalytically active layer on top of the preheater chip. The sensitivity, selectivity and stability of the device have been evaluated using several reactive test gases. Measurements with and without a catalytically active filter layer has been performed. A method for concentration prediction based on the ideal gas law using temperature cycling of the gas has been developed.