2025 SMSI Bannerklein

A6.2 Applications of Tactile Microprobes for Surface Metrology

Event
SMSI 2020
-
(did not take place because of Covid-19 virus pandemic)
Band
SMSI 2020 - Sensors and Instrumentation
Chapter
A6 MEMS Sensors
Author(s)
C. Reuter, M. Holz, A. Reum - nano analytik GmbH, Ilmenau (Germany), M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), M. Hofmann, I. Rangelow - Technische Universität Ilmenau, Ilmenau (Germany)
Pages
87 - 88
DOI
10.5162/SMSI2020/A6.2
ISBN
978-3-9819376-2-6
Price
free

Abstract

In this paper we discuss the capabilities of micromachined piezoresistive silicon cantilevers regarding their application for surface metrology [1]. Measurements were performed using contact-mode Atomic Force Microscopy (AFM) and contact-resonance mode, respectively [2]. The contact-mode AFM measurements were carried out inside a Scanning Electron Microscope (SEM) vacuum chamber enabling correlative scanning probe and electron microscopy.

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