2025 SMSI Bannerklein

A6.4 A MEMS micromachined detector platform for kW power radiation in a wide spectral range

Event
SMSI 2020
-
(did not take place because of Covid-19 virus pandemic)
Band
SMSI 2020 - Sensors and Instrumentation
Chapter
A6 MEMS Sensors
Author(s)
A. Laades, S. Görlandt, C. Heinze, F. Machalett, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
Pages
91 - 92
DOI
10.5162/SMSI2020/A6.4
ISBN
978-3-9819376-2-6
Price
free

Abstract

The focus of the development is on a silicon membrane based thermal detector for radiation extending from the infrared to the extreme ultraviolet (XUV) featuring very high powers in the range 100 W to 5 kW. The thermal radiation detector is equipped with a sensor platform chip consisting of an appropriate absorber and a silicon-based temperature sensor unit. This approach allows the radiation to be efficiently absorbed and converted into heat in the absorber leading to a local increase in temperature and a detectable temperature difference in the silicon unit.

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